材料 Material |
高純度Al2O3單晶 純度≥99.996% High purity Al2O3single crystal purity≥99.996% |
晶向 Orientation |
A |
C |
|
直徑 Di***eter |
100 &plu***n;0.1mm |
厚度 Thickness |
650um&plu***n;10μm可定制 |
TTV |
<5μm |
WRAP |
<2μm |
BOW |
<5μm |
*** Primary Flat Location |
A-axis &plu***n; 0.2° |
正面 Front Surface |
拋光 |
背面 Backside |
腐蝕/拋光 |
表面粗糙度(Ra)Surface Roughness |
<0.2nm |
包裝 Package |
***無塵室,氮保護(hù)氣氛。25片盒裝 Clean Room, Nitrogen Atmosphere. 25 wafers cassette |