來自SCS G3家族的精密旋轉(zhuǎn)涂敷系統(tǒng)用于在平面基板上***的涂敷流體，如光刻膠、聚酰***、金屬有機(jī)物、摻雜物、和二氧化硅薄膜。G3系列旋轉(zhuǎn)涂敷機(jī)設(shè)立操作***性和編程靈活性的新標(biāo)準(zhǔn)，提供了高水平的旋轉(zhuǎn)精度和重復(fù)性及加速減速控制。
特性及規(guī)格包括：
-- Fast, simple programming by means of microprocessor-based control, using front panel LCD display and keypad
借助微處理器控制，通過前面板LCD及鍵盤操作實(shí)現(xiàn)快速簡(jiǎn)單的編程
-- Closed loop servomotor control for precise speed regulation
閉環(huán)伺服電機(jī)控制實(shí)現(xiàn)***的速度調(diào)節(jié)
-- Capacity to execute one recipe with acceleration time adjustable from 1-30 seconds, spin for preset speed and time and deceleration time adjustable from 1-30 seconds.
可執(zhí)行涂敷程序的加速調(diào)節(jié)1-30秒，預(yù)設(shè)的旋轉(zhuǎn)速度和時(shí)間及加速度調(diào)節(jié)1-30秒
-- Spin profiles adjustable in 1.0 rpm increments, 0.1 second timing increments, and 1.0 second increments for dwell time, with precise repeatability from cycle-to-cycle
旋轉(zhuǎn)曲線調(diào)整以1rpm為增量，0.1秒時(shí)間增量和1秒保持時(shí)間增量及***的循環(huán)重復(fù)性
-- Customer evaluati*** yielded thickness uniformity in the range of +/- 3.0%
用戶評(píng)估產(chǎn)出的厚度均勻性在±3%左右
-- Compact housing on all sizes for convenience when using fume hoods
緊湊的外殼便于在通風(fēng)櫥柜中使用
-- Chuck Rotation Speed: 0-9,999 RPM in 1 RPM increments
卡盤的旋轉(zhuǎn)速度0-9,999轉(zhuǎn)/分鐘，以1轉(zhuǎn)/分鐘為增量
-- Acceleration/Deceleration: 0.1 to 25.5 seconds, 0.1 second increments (with inertial limitati***)
加速/減速：0.1-25.5秒，以0.1為增量（慣性限制）
-- Dwell time: 0-999 seconds in 1 second increments
保持時(shí)間：0-999秒以1秒為增量
-- Unit Dimensi***: 30.5cm W x 41.9cm D x 30.2cm H
